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Wafer Process Systems, Inc.
Leading Supplier of Wet Chemical Process Equipment to the Semiconductor.
Wafer Process Systems Inc. was established in 1983 by current CEO and President Douglas H. Caldwell out of necessity to satisfy the industry needs for in field service and wet process equipment support. The company originated mainly as a service and support organization for local Silicon Valley customers. As our customer’s needs for equipment service, modifications driven by process changes and new equipment requirements increased Wafer Process Systems Inc. created a full time engineering team to support the manufacturing
Wafer Process Systems Inc. manufactures a complete line of Manual, Semi Automated and Fully Automated Dry In / Dry Out Wet Chemical Process Equipment used in the manufacturing silicon and compound materials used in the manufacturing of microelectronic devices, computer disc drive media and slider assemblies, flat panel displays and photovoltaic products. Process applications include Surface Pre Cleans for Oxides and Metals Deposition (SC1 and SC2), Oxide Resist Strip (H2SO4/H202), Metal Resist Strip (Organic Solvent Chemistries), Metal Etch (Au, Cu, CR, Al), Nitride Strip, Buffered Oxide Etch, Electroless Chemical Deposition and Electro Chemical Deposition and Conveyorized Spray Etch systems. All Equipment designs are compatible for use in a Class 10 Clean Room Environment.
Wafer Process Systems Inc. manufactures a complete line of Wet Chemical Process Equipment used for parts cleaning in off line processes such as Quartz Tube and Quartz Cassette Cleaning (CVD Tube and Cassette Cleaning), Bell Jar Cleaning and Track Equipment Resist removal.
Wafer Process Systems Inc. manufactures raw material substrate cleaning equipment for Post Saw Adhesive Removal and Cleaning, Post Lapping and Post Polishing Clean, Aqueous Parts Cleaning for Optics and Machined Parts Cleaning.
Wafer Process Systems Inc. manufactures precision IPA Aerosol Drying System using the patented LDT process. The LDT Drying System can be provided as a stand alone, modular drop in or as part of an automated dry in/dry out wet process system.
Wafer Process Systems Inc. performs in field modifications to existing equipment installations to accommodate process changes and/or upgrades for our customers equipment without the need of expensive facility cost associated with removal and installation of new equipment.
Wafer Process Systems Inc. also stocks a complete inventory of spare parts including stand alone controllers and sensors which can be cross referenced to competitor’s parts for second sourcing replacements. If the Original Equipment Manufacturer you have purchase your equipment from is now out of business, Wafer Process Systems Inc. can provide the complete support you need to keep your equipment safely functioning for years to come.
To find out more information on what we can offer you, CLICK HERE today or give us a call anytime at (408)446-3010
